| EAPSM |
embedded attenuated phase-shift mask |
| EAROM |
electrically alterable read-only memory |
| EASE |
equipment and software emulator |
| e-beam |
electron beam |
| EBHT |
electron-beam high-throughput lithography |
| EBIC |
electron beam-induced current |
| EBR |
edge bead removal |
| EC |
engineering change; equipment controller |
| ECA |
engineering capability assessment |
| ECAD |
electronic computer-aided design; engineering computer-aided design |
| ECAE |
electronic computer-aided engineering |
| ECL |
emitter coupled logic |
| ECN |
engineering change notice |
| ECO |
engineering change order |
| ECQB |
electrochemical quartz crystal balance |
| ECR |
electron cyclotron resonance |
| EDA |
electronic design automation |
| EDS |
energy-dispersive spectroscopy |
| EDU |
equipment-dependent uptime |
| EDX |
energy-dispersive X-ray |
| EDXA |
energy-dispersive X-ray analysis |
| EEDF |
electron energy distribution function |
| EELS |
electron energy-loss spectroscopy |
| EEPROM |
electrically erasable programmable read-only memory |
| EFEM |
equipment front-end module |
| EFOCS |
evanescent fiber-optic chemical sensor |
| EFTIR |
emission Fourier transform infrared spectroscopy |
| EFV |
excess flow valve |
| EGE |
ethylene glycol ethers |
| EHS |
extremely hazardous substance |
| EI |
equipment integration |
| EID |
Equipment InterfaceDevelopment |
| EIP |
Equipment Improvement Program; Equipment Improvement Project |
| EIS |
electrochemical impedance spectroscopy |
| EKF |
extended Kalman filter |
| ELF |
extremely low frequency |
| EM |
enterprise model; electromagnetic; electromigration |
| EMA |
equipment maturity assessment |
| EMC |
electromagnetic capability; electromagnetic compatability |
| EMF |
electromagnetic field |
| EMG |
electromigration |
| EMI |
electromagnetic interference |
| EMMA |
electron microscopy and microanalysis |
| EMP |
electromagnetic pulse |
| EMR |
enter move request |
| EMU |
electromagnetic unit |
| EOS |
electrical overstress |
| EOT |
end of transfer; equivalent oxide thickness |
| EP |
extreme pressure; electropolish |
| EPL |
electron projection lithography |
| EPR |
electron paramagnetic resonance |
| EPROM |
electrically programmable read-only memory |
| EPSS |
electronic performance support system |
| EPT |
equipment performance tracking |
| ERAM |
equipment reliability |
| ERM |
enterprise reference model |
| ERN |
external recurrent neural network |
| ERP |
extended range pyrometer |
| ERS |
event reporting standard |
| ERT |
emergency response time |
| ES |
engineering specification; expert system |
| ESC |
electrostatic chuck |
| ESCA |
electron spectroscopy for chemical analysis |
| ESD |
electrostatic discharge |
| ESH |
environment |
| ESM |
electronic service manual |
| ETAB |
Executive Technical Advisory Board |
| ETQR |
External Total Quality and Reliability |
| EUV |
extreme ultraviolet |
| eV |
electron volt |
| EWMA |
exponentially weighted moving average |
| XLS |
excimer laser system; extended light scatterer |
