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Glossary of Technical Terms: H


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H hydrogen
HAP hazardous air pollutant
HARI high aspect ratio inspection
HAST highly accelerated stress testing
HAZCOM Hazard Communication Standard
HB horizontal Bridgeman crystal
HCI hot carrier injection
HCM hollow cathode magnetron
HCMOS high-density CMOS
HCS hot-carrier suppressed
HD high density
HDL hardware description language
HDP high-density plasma
HDPE high-density polyethylene
He helium
HEM high-efficiency matching
HEPA high-efficiency particulate air
Hf hafnium
HF hydrofluoric acid
HIBS heavy ion backscattering spectrometry
HiPOx high-pressure oxygen
HLF horizontal laminar flow
HMDS hexamethyldisilizane
HMIS hazardous materials inventory statement
HMMP hazardous materials management plan
HMOS high-performance MOS; high-density MOS
HOMER hazardous organic mass emission rate
HOPG highly oriented pyrolitic graphite
HP high purity
HPEM Hybrid Plasma Equipment Model
HPI high pressure isolation
HPL high-performance logic
HPLC high-performance liquid chromatography
HPM hazardous production materials; high-purity metal
HPV high-pressure vent
HRA human reliability analysis
HRR high ramp rate
HRTEM high-resolution transmission electron microscopy
HSQ hydrogen silsesquioxane
HTO high-temperature oxidation
HTRB high-temperature reverse bias
HUPW hot ultrapure water
HVAC heating




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