| Fe |
iron |
| I |
iodine |
| I/O |
input/output |
| I2L |
integrated injector logic |
| I300I |
International 300 mm Initiative |
| IC |
integrated circuit; Investment Council; ion chromatography |
| ICAP |
inductively coupled argon-plasma spectrometry |
| ICMS |
integrated circuit measurement system |
| ICP |
inductively coupled plasma |
| ICP-AES |
inductively coupled plasma atomic emission spectroscopy |
| ICP-MS |
inductively coupled plasma mass spectrometry |
| ICT |
ideal cycle time |
| IDEAL |
initiating |
| IDL |
interface definition language |
| IDLH |
immediately dangerous to life or health |
| IDS |
interactive diagnostic system |
| IEA |
ion energy analysis |
| IEC |
infused emitter coupling |
| IEDF |
ion energy distribution function |
| IERN |
internal-external recurrent neural network |
| IF |
interface |
| IGFET |
insulated-gate field-effect transistor |
| ILB |
inner lead bond |
| ILD |
interlevel dielectric; interlayer dielectric |
| ILS |
intracavity laser spectroscopy |
| IM |
integrated model; integrated metrology |
| IMD |
intermetal dielectric |
| IMMA |
ion microphobe mass analysis |
| IMS |
ion mobility spectroscopy |
| In |
indium |
| INCAMS |
individual cassette manufacturing system |
| IPA |
isopropyl alcohol |
| IPL |
ion projection lithography |
| IPT |
ideal process time |
| Ir |
iridium |
| IR |
infrared |
| IRAS |
infrared reflection-absorption spectroscopy |
| IRIS |
imaging of radicals interacting with surfaces |
| IRN |
internal recurrent neural network |
| IRONMAN |
Improving Reliability of New Machines at Night |
| IRTC-1 |
interconnect reliability test chip-1 |
| IS |
information systems; interface specifications; integrated systems |
| ISC |
Industry Steering Council |
| ISEM |
inspection/review specific equipment model |
| ISM |
inductor super magnetron |
| ISMT |
International SEMATECH |
| ISPM |
in situ particle monitor |
| ISR |
in situ rinse |
| ISS |
ion scattering spectroscopy |
| ITRI |
Interconnection Technology |
| ITRS |
International Technology |
| IVH |
interstitial via hole |
| IVP |
integrated vacuum processing |
| LC |
inductance-capacitance; liquid chromatography |
| Research |
Institute |
| SFCS |
I/F shop floor control system interface |
| X |
inductive reactance |
