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- Glossary of Technical Terms: L
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| La |
lanthanum |
| LAMMA |
laser micro-mass analysis |
| LAMMS |
laser micro-mass spectroscopy |
| LCA |
lifecycle analysis |
| LCC |
leaded chip carrier |
| LCL |
lower confidence limit |
| LDD |
lightly doped drain |
| LDL |
lower detection limit |
| LDP |
low-density plasma |
| LDPE |
low-density polyethylene |
| LEC |
liquid encapsulated Czochralski crystal |
| LEL |
lower explosive limit |
| LER |
line edge roughness |
| LF |
laminar flow |
| LFL |
lower flammable limit |
| LGQ |
linear Gaussian quadratic |
| Li |
lithium |
| LI |
laser interferometry |
| LIC |
linear integrated circuit |
| LID |
leadless inverted device |
| LIFO |
last in |
| LIMA |
laser-induced mass analysis |
| LIMS |
laser-induced mass spectrometry |
| LLCC |
leadless chip carrier |
| LLD |
lower limit of detection |
| LLNQ |
least lots next queue |
| LM |
light microscope |
| LMMA |
laser microprobe mass analysis |
| LOCOS |
local oxidation of silicon |
| LOS |
loss of selectivity |
| LPC |
linear predictive coding; laser particle counter; low particle concentration; liquid-borne particle counter |
| LPCVD |
low-pressure chemical vapor deposition |
| LPD |
light point defect |
| LPE |
liquid phase epitaxy |
| LPI |
low-pressure isolation |
| LPP |
laser-produced plasma |
| LRS |
laser Raman spectroscopy |
| LSE |
latex sphere equivalent |
| LSHI |
large-scale hybrid integration |
| LSI |
large-scale integration |
| LSM |
laser scanning microscope |
| LTA |
laser thermal anneal |
| LTCVD |
low-temperature chemical vapor deposition |
| LTO |
low-temperature oxidation/oxide |
| LTPD |
lot tolerance percent defective |
| LTV |
local thickness variation |
| LV |
latent variable |
| LVDT |
linear voltage differential transducer |
| LVI |
low-voltage inverter |
| LVS |
layout verification of schematic |
| LWR |
linewidth reduction |
| LWS |
large wafer study |
| Pb |
lead |
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