| Hg |
mercury |
| M |
million; mega |
| MACT |
maximum achievable control technology |
| MALDI |
matrix-assisted laser desorption and ionization |
| MAN |
metropolitan area network |
| MAP |
manufacturing automation protocol |
| MAWP |
maximum allowable working pressure |
| MB |
machine batch |
| MBC |
machine bath collection |
| MBE |
molecular beam epitaxy |
| MBPC |
model-based process control |
| MBTC |
model-based temperature control |
| MCBA |
mean cycles between assists |
| MCBF |
mean cycles between failures |
| MCBI |
mean cycles between interrupts |
| MCM |
multichip module; manufacturing cycle management |
| MCP |
master control processor;multichip package |
| MCS |
material control system |
| MCU |
microprocessor control unit; mobile calibration unit |
| MCVD |
metal chemical vapor deposition |
| MDL |
minimum detection limit; |
| MD-MOS |
multi-drain metal-oxide semiconductor |
| MDQ |
market-driven quality |
| MEBS |
medium energy backscattering spectrometry |
| MEEF |
mask error enhancement factor |
| MEMS |
microelectromechanical system |
| MERIE |
magnetically enhanced reactive ion etching |
| MES |
manufacturing execution systems |
| MESFET |
metal-semiconductor field-effect transistor |
| METS |
Materials and Equipment Trading Service |
| MeV |
mega electron volt |
| MFC |
mass flow controller |
| MFM |
mass flow meter |
| Mg |
magnesium |
| MG |
manufactured goods |
| MHI |
material hazard index |
| MHz |
megahertz |
| MIC |
monolithic integrated circuit |
| MID |
material ID |
| MIE |
magnetron ion etching |
| MIM |
metal-insulator-metal |
| MIS |
metal insulator silicon |
| MLCC |
multilayer ceramic capacitor |
| MLL |
modify lot location |
| MLM |
multilevel metal |
| MLR |
message log report |
| MMC |
Manufacturing Methods Council |
| MMD |
Microlithographic Mask Development program |
| MMIC |
monolithic microwave integrated circuit |
| MMM |
material movement management |
| MMMS |
Material Movement |
| MMO |
multimodel optimization |
| MMOS |
modified MOS |
| MMST |
Microelectronics Manufacturing Science and Technology |
| Mn |
manganese |
| MNOS |
metal-nitride-oxide semiconductor |
| MNS |
metal-nitride semiconductor |
| Mo |
molybdenum |
| MO |
metal-organic |
| MOCVD |
metal-organic chemical vapor deposition |
| MOP |
modify operating procedures |
| MOS |
metal-oxide semiconductor |
| MOS-C |
metal-oxide semiconductor capacitor |
| MOSFET |
metal-oxide semiconductor field-effect transistor mp melting point |
| MP |
massively parallel |
| MP-OES |
multipoint optical emission spectroscopy |
| MPRES |
modular plasma reactor simulator |
| MPU |
microprocessor unit |
| MRP |
materials requirements planning |
| MRP-II |
manufacturing resource planning |
| MS |
mass spectrometry; mass spectroscopy |
| MSDS |
Material Safety Data Sheet |
| MSEM |
Metrology Specific Equipment Model |
| MSG |
Management Steering Group |
| MSHA |
Mine Safety and Health Administration |
| MSI |
medium-scale integration; manufacturing support item |
| MSID |
mass spectrometer lead detector |
| MSLD |
mass spectrometer leak detector |
| MSTAB |
Manufacturing Systems Technical Advisory Board |
| MTBA |
mean time between assists |
| MTBF |
mean time between failures |
| MTBFp |
mean (productive) time between failures |
| MTBI |
mean time between interrupt; mean time between incident |
| MTOL |
mean time off line; mean time on line |
| MTS |
Material Tracking Standard |
| MTTA |
mean time to assist |
| MTTF |
mean time to failure |
| MTTR |
mean time to repair |
| MV |
megavolt |
| MVTR |
moisture vapor transmission rate |
| MW |
molecular weight |
| MWBC |
mean wafers between cleans |
| MWT |
monitor wafer turner |
