From Universal Enterprise

Resource Resource Overview Semiconductor Glossary Bare Die And Wafer Semiconductor Packages Glossary of Technical Terms

Glossary of Technical Terms: R A B C D E F G H I J K L M N O P Q R S T U V W X Y Z EQUIP RTC equipment real-time control R2R run-to-run Ra radium RAC remote access and control RAIRS reflection-absorption infrared spectroscopy RAM random access memory;reliability RAMP Reliability Analysis and Modeling Program Rb rubidium RBS refractive backscattering; Rutherford backscattering spectroscopy RCWA rigorous coupled wave analysis RDR rotating disk reactor Re rhenium REL recommended exposure limit RESSFOX recessed sealed sidewall field oxidation RF radio frequency; resonance frequency RFI request for information; radio frequency interference RFM radio frequency monitoring RFO restricted flow orifice RFP request for plan; request for proposal; radio frequency probe RGA residual gas analysis RGV rail-guided vehicle RH relative humidity RI reliability improvement RIE reactive ion etch RISC reduced instruction set computer/computing RIST rule induction and statistical testing RMOS refractory metal-oxide semiconductor RMS root mean square; Recipe Management Standard RMTF Recipe Management Task Force RNN recurrent neural network RO reverse osmosis ROC remote object communications ROE return on equity ROI return on investment ROM read-only memory RPAO remote plasma-assisted oxidation RR removal rate RRMSEP relative root mean square error of prediction RSE reactive sputter etch RSF relative sensitivity factor RSM response surface methodology; response surface matrix RT room temperature RTA rapid thermal anneal RTB real-time backplane RTCVD rapid thermal chemical vapor deposition RTD resistance temperature detector RTL resistor-transistor logic; register transfer level RTM rapid thermal multiprocessing RTO rapid thermal oxidation; regenerative thermal oxidizer RTP rapid thermal processing/processor RTR real-time reporting Ru ruthenium